NAC14000 for development,
NAC13000 for stripping
Automatic Chemical Controller
Na2CO3/K2CO3/TMAH/NaOH/KOH
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An ultra-thin substrate can be
produced by high-precision
control of the developing solution -
The development process is the most important factor in achieving an ultra-thin substrate. With the AQUA AQCESS CONTROLLER, you can stabilize the developing solution at a FILM concentration of ± 0.5 g/L. Can be used for producing ultra-thin substrates.
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- Productivity
UP - Production stability
UP - Quality stability
UP - Real time
display
- Productivity
Product features
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Fine pattern support
Fine patterns cannot be achieved without a high-precision chemical control. By using the AQUA AQCESS CONTROLLER, the FILM concentration can be controlled at ± 0.5 g/L. Thin line etching is also possible on a clear finish film.
After development 
After etching
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Production state can be checked any time
With the logger function, you can instantly check whether the concentration is fluctuating or is stable during the production stage and send a prompt feedback to the production site. This function is a boon for production supervisors.
These are our unique features
- Various types of sensors
- High-precision/high- stability
- Small-sized/light-weight
- Direct & real time measurements
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Measurement flow and merits of developing/stripping solutions
Developed film finish width
variations (σ)Real time advanced control significantly stabilizes the film development finishing process
Specifications
| Applicable chemicals | Na2CO3/K2CO3/TMAH/NaOH/KOH | |
|---|---|---|
| Model code | NAC14000 for film development | NAC13000 for stripping |
| Concentration specifications | Na2CO3/K2CO3/TMAH, etc. | NaOH/KOH/TMAH, etc. |
| Display device | 12-inch LCD display | 12-inch LCD display |
| Source voltage | DC 24 V | DC 24 V |
| External dimensions (mm) / weight | 328 (W) × 225 (H) × 99 (D) 4.3 kg | 328 (W) × 225 (H) × 99 (D) 4.3 kg |
Can also be used for chemicals not mentioned above
- Inquiries Concerning Products and Services
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- inquiries by e-mail
- Contact Us
- Inquiries by phone
- +81-72-726-6665